Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Industries

Microelectronics

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
1/EA
Min Order Qty
1

RLS1FPS200

Product ID: RLS1FPS200
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F005H21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F003H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F900H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F003H21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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RM2F005H21-COA

Product ID: RM2F005H21COATIMMD
Unit of Measure
24/EA
Min Order Qty
48

RM2F007H21-COA

Product ID: RM2F007H21COATIMMD
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F005H21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

RM2F020H21-COA

Product ID: RM2F020H21COATIMMD
Unit of Measure
1/EA
Min Order Qty
1

RM2F070H21-COA

Product ID: RM2F070H21COATIMMD
Unit of Measure
24/EA
Min Order Qty
48

RM2F050H21-COA

Product ID: RM2F050H21COATIMMD
Unit of Measure
1/EA
Min Order Qty
1
88 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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