Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.2 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3NA7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN3NB7BWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes

Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 3, Silicone Elastomer O-ring

Product ID: AB1NB3WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes
CRTG AB1U200Z-7J product photo

CRTG AB1U200Z-7J

Product ID: AB1U200Z7J
Unit of Measure
1/EA
Min Order Qty
1

MCS4463U010ZH

Product ID: MCS4463U010ZH
Unit of Measure
1/EA
Min Order Qty
1

Filter 30" Ultipor GF+ 2µm

Product ID: MCY1003U2-20ZH13
Unit of Measure
1/EA
Min Order Qty
6

This product is currently not available. Please contact us for more information.

5ESC10770-4U0005ZJ-141

Product ID: P2259066
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® GF-HT, TA71HT003A

Product ID: TA71HT003A
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® GF-HT, TA73HT003A

Product ID: TA73HT003A
Unit of Measure
1/EA
Min Order Qty
1
Food Contact Compliant
No
5ESC10670-2U002J-076 product photo

5ESC10670-2U002J-076

Product ID: 5ESC106702U002J076
Unit of Measure
1/EA
Min Order Qty
1
125 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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