Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

CRTG DFA4001U2-20Z

Product ID: DFA4001U2-20Z
Unit of Measure
6/EA
Min Order Qty
6
Filter 10" Ultipor GF+ 2µm product photo

Filter 10" Ultipor GF+ 2µm

Product ID: AB1U2-20Z7H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG AB1U200Z-7J product photo

CRTG AB1U200Z-7J

Product ID: AB1U200Z7J
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® GF Plus Filter Cartridges, Removal Rating 2 μm, Length 20 inches

Product ID: AB2U2-20Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Ultipor® GF Plus Filter Cartridges, Removal Rating 0.45 μm, Length 20 inches

Product ID: AB2U00457J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Ethylene Propylene
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Ultipor® GF Plus Filter Cartridges, Removal Rating 1 μm, Length 20 inches

Product ID: AB2U010Z7H15
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Ultipor® GF Plus Filter Cartridges, Removal Rating 6 μm, Length 20 inches

Product ID: AB2U6-40Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.2 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3NA7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.65 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3NK7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.65 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches

Product ID: AB3U2-20Z7H15
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
H15

This product is currently not available. Please contact us for more information.

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone, 226 O-ring replacement size

Product ID: AB3U6-40Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
Gasket O-Ring Code
H4
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This product is currently not available. Please contact us for more information.

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U100Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
Gasket O-Ring Code
H4
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175 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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