Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Brand

Ultipor®

AB05U200Z7H4

Product ID: AB05U200Z7H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG AB1U200Z-7J product photo

CRTG AB1U200Z-7J

Product ID: AB1U200Z7J
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, Ethylene Propylene

Product ID: AB3U010Z7J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
Gasket O-Ring Code
J
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U100Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
Gasket O-Ring Code
H4
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Filter 40" Ultipor GF+ 1µm product photo

Filter 40" Ultipor GF+ 1µm

Product ID: AB4U010Z7J
Unit of Measure
1/EA
Min Order Qty
1
CA41083D11 product photo

CA41083D11

Product ID: CA41083D11
Unit of Measure
1/EA
Min Order Qty
1

MCS1001U200ZH

Product ID: MCS1001U200ZH
Unit of Measure
1/EA
Min Order Qty
1

MCS1001U010ZH

Product ID: MCS1001U010ZH
Unit of Measure
1/EA
Min Order Qty
1

MCS1001U6-40ZH13

Product ID: MCS1001U640ZH13
Unit of Measure
1/EA
Min Order Qty
1

MCS1001U220ZH

Product ID: MCS1001U220ZH
Unit of Measure
1/EA
Min Order Qty
1

MCS1001U100ZH13

Product ID: MCS1001U100ZH13
Unit of Measure
1/EA
Min Order Qty
1

MCS1001USH13

Product ID: MCS1001USH13
Unit of Measure
1/EA
Min Order Qty
1
110 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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