Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

Product Type

Filter Cartridges

AB05U200Z7H4

Product ID: AB05U200Z7H4
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-3U220ZJ-142 product photo

5ESC10770-3U220ZJ-142

Product ID: 5ESC107703U2S00005
Unit of Measure
1/EA
Min Order Qty
1

Filter 30" Ultipor GF+ 2µm

Product ID: MCY1003U2-20ZH13
Unit of Measure
1/EA
Min Order Qty
6

This product is currently not available. Please contact us for more information.

CRTG MCY4463U2-20ZJ

Product ID: MCY4463U220ZJ
Unit of Measure
24/EA
Min Order Qty
24

5ESC10770-4U0005ZJ-141

Product ID: P2259066
Unit of Measure
1/EA
Min Order Qty
1
5ESC10670-3U001ZJ-154 product photo

5ESC10670-3U001ZJ-154

Product ID: 5ESC106703U0S00001
Unit of Measure
1/EA
Min Order Qty
1
W8T-150-30-U010ZJ product photo

W8T-150-30-U010ZJ

Product ID: W8T15030U010ZJ
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 2-3/4", U010Z, 1 MICRON product photo

ELEMENT 2-3/4", U010Z, 1 MICRON

Product ID: CA41079D06
Unit of Measure
1/EA
Min Order Qty
1

PUY01ZU010ZJ

Product ID: PUY01ZU010ZJ
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-3U6-40ZJ-022

Product ID: P2107759
Unit of Measure
1/EA
Min Order Qty
1
5ESC10670-2U002J-076 product photo

5ESC10670-2U002J-076

Product ID: 5ESC106702U002J076
Unit of Measure
1/EA
Min Order Qty
1

WCN80-20-U001ZJ-MOD

Product ID: WCN8020U001ZJMOD
Unit of Measure
1/EA
Min Order Qty
1
104 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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