Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes
RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 20 Inches

Product ID: PFTM520UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 5 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: PFTM52UEPFB
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 40 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM540UHFH238
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 5 µm, polypropylene, Size 2 bag, Nitrile, Plastic self-adjusting flange

Product ID: PFTM52UNPFC
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 60 Inches

Product ID: PFTM560UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: PFTM4060UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 70 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, Pall Marksman Series vessels, Rosedale4, Strainrite, Krystil Klear5

Product ID: PFTM702UEPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ Retrofit, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 38 Inches, EPDM

Product ID: PFTM5740E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
38/965 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
150 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 40 Inches, EPDM

Product ID: PFTM54UEPFA
Unit of Measure
4/EA
Min Order Qty
4
9,545 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English