Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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This product is currently not available. Please contact us for more information.

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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LSS06F2H

Product ID: LSS06F2H
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
6 in
Coalescer Length (Metric)
15.2 cm

MARKSMAN SIZING KIT

Product ID: MARKSMANSIZINGKIT
Unit of Measure
1/EA
Min Order Qty
1
MBS1001M100H product photo

MBS1001M100H

Product ID: MBS1001M100H
Unit of Measure
1/EA
Min Order Qty
1

PSS® Plus Series Metal Elements

Product ID: MBS1001PAHJ7
Unit of Measure
1/EA
Min Order Qty
1
Adaptor
Double Open End, Flat Gasket
Filter Media
316 L Stainless Steel
Gasket Seal
Ethylene Propylene Steam Service
Maximum Differential Pressure
75 psid forward and reverse @ 200° F (93.3°C)
Nominal Length (Imperial)
10 in
Removal Efficiency
99.98 %
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MBS1001S050J7

Product ID: MBS1001S050J7
Unit of Measure
1/EA
Min Order Qty
1
MBS1002P05H product photo

MBS1002P05H

Product ID: MBS1002P05H
Unit of Measure
1/EA
Min Order Qty
1

MCC1401E100H1-316L

Product ID: MCC1401E100H1316L
Unit of Measure
1/EA
Min Order Qty
1

MCC1401E500H 226

Product ID: MCC1401E500H226
Unit of Measure
1/EA
Min Order Qty
1

MCS1001U010ZH13

Product ID: MCS1001U010ZH13
Unit of Measure
12/EA
Min Order Qty
12

MCS1001ECH

Product ID: MCS1001ECH
Unit of Measure
6/EA
Min Order Qty
6

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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