Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Seitz® HS Series Depth Filter sheet, HS 400 600x612

Product ID: 1430458
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
23.62 x 24.09 in
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Seitz® HS Series Depth Filter Sheets, HS 1000 400x400

Product ID: 1431061
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® HS Series Depth Filter sheet, HS 400 400x400

Product ID: 1430457
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
15.75 x 15.75 in
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Seitz® HS Series Depth Filter sheet, HS 2000 600x612

Product ID: 1432058
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
23.62 x 24.09 in
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HS 9000 400x400 OL in cartons

Product ID: 1439025
Unit of Measure
1/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® HS Series Depth Filter sheet, HS 2000 400x400

Product ID: 1432057
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.75 x 15.75 in
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Seitz® HS Series Depth Filter sheet, HS 4000 400x400

Product ID: 1434042
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.75 x 15.75 in
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V-BAND KIT FOR SUPRApak L HOUSINGS

Product ID: 20005766-K
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Red Pneumatic Tubing (2m) with Stäubli fittings, CT001-INTUBING

Product ID: CT001-INTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Nipple
Length (m)
2 m

Palltronic® Compact Touch External Power Supply, CT001-EXTPWR

Product ID: CT001-EXTPWR
Unit of Measure
1/EA
Min Order Qty
1
Adapter Info
Includes EU, UK, US, AU adaptors

Profile® II Filter Cartridges, RF-Style 30 in, 10 µm W Option

Product ID: R3F100W
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Maximum Differential Pressure
4 bard (60 psid)
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FBT Sanitary housing for one cartridge filter - 254 mm (10”)

Product ID: FBT011G23H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
300 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
434 mm
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401 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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