Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Profile® II Filter Cartridge 20 in, 5 µm

Product ID: RM2F005W
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
8 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Maximum Differential Pressure
4 bard (60 psid)
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FEATURED

Junior Filter Emflon PFR 0.2µm

Product ID: SBF1PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
410 cm²
Filter Cartridge Style
SBF-style junior
Cartridge Length (Imperial)
10 in
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SUPRAcap K 250 SC050X250

Product ID: SC050X250
Unit of Measure
1/EA
Min Order Qty
1
Food Contact Compliant
No
SC050X700 product photo

SUPRAcap K 700 SC050X700

Product ID: SC050X700
Unit of Measure
1/EA
Min Order Qty
1
SC050X900 product photo

SUPRAcap K 900 SC050X900

Product ID: SC050X900
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak L Series-SA Filter Systems, 6-High Split Bowl, w/Vent, DN6 Hose Tail

Product ID: SPLSA632TVA
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
1976 mm
Cartridge Style
SUPRApak L
Design Pressure (barg)
Liquids: -1 to 8 barg Gases: -1 to 3.5 barg
Diameter (Imperial)
18 in
Housing Height (Metric)
4113 mm
Nominal Diameter (Metric)
457.2 mm
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RETROFIT ADAPTOR SPM 3-HIGH TYPE 2

Product ID: SPMRTF23
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak Adaptor for SDII 1-High

Product ID: SPMRTF21
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 4-HIGH TYPE 2

Product ID: SPMRTF24
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 2-HIGH TYPE 2

Product ID: SPMRTF22
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak S series Filter Housings without Base Plate, 1 in, Clamp Coupling (ISO 2852)

Product ID: SPSWA2300
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
260 mm
Cartridge Style
SUPRApak S
Design Pressure (barg)
-1 to 6 bar
Diameter (Imperial)
5.1 in
Housing Height (Metric)
591.6 mm
Nominal Diameter (Metric)
130 mm
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E962-80 PSP GSK

Product ID: T10512117
Unit of Measure
1/EA
Min Order Qty
1
401 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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