Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Food & Beverage

5µm (nominal) CB Micro-Carbon™ II Series filter, 10", DOE with gaskets

Product ID: C10PCB5
Unit of Measure
12/EA
Min Order Qty
12

Micro-Carbon™ II Series Filter 20 in, 5 µm

Product ID: C20PPHP
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Outer shell - Porous, high density polyethylene (70 µm nominal)
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Hercuprene
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5µm (nominal) CB Micro-Carbon™ II Series filter, 20", DOE with gaskets

Product ID: C20PCB5
Unit of Measure
6/EA
Min Order Qty
6

Micro-Carbon™ II Series Filter 30 in 5 µm

Product ID: C30PPHP
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Outer shell - Porous, high density polyethylene (70 µm nominal)
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Hercuprene
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C9.75P-PHP

Product ID: C975PPHP
Unit of Measure
20/EA
Min Order Qty
20

C9.75P-CB5

Product ID: C975PCB5
Unit of Measure
12/EA
Min Order Qty
12

RISER PIPING WSFZ TC 2.0

Product ID: GFB0156
Unit of Measure
1/EA
Min Order Qty
1

WSFZ Standard Accessory Kit

Product ID: GFB0157
Unit of Measure
1/EA
Min Order Qty
1

O-RING BS3601-242 FLUOROCARBON FDA USP3A

Product ID: GK1242PH01
Unit of Measure
1/EA
Min Order Qty
1

IDL filter housing for one cartridge type 1000 series

Product ID: IDL11GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
321 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
1000 series
Design Pressure (barg)
-1/17,9@-10/40°C -1/13,8@-10/150°C Barg / T°C
Housing Height (Metric)
362 mm
Nominal Diameter (Metric)
122 mm
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IDL13GN16J7

Product ID: IDL13GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
822 mm
Cartridge Lock
V-band
Cartridge Style
1001 V-band
Design Pressure (barg)
17.9 @ 40°C
Diameter (Imperial)
4.81 in
Housing Height (Metric)
870 mm
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Stainless steel, 10", 1" NPT, EPR seal for DOE cartridge (without gasket)

Product ID: IDLD1GN16J
Unit of Measure
1/EA
Min Order Qty
1
410 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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