Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

KIT PDC20142S

Product ID: PDC20142S
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Nexis® T Series Filter Cartridges, NXT2030UM7WS480 product photo

Nexis® T Series Filter Cartridges, Polypropylene, 20 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT2030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Ultipleat® High Flow Element, HFU640UY100JUW

Product ID: HFU640UY100JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""")
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA1PFRW1

Product ID: KA1PFRW1
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak PH 7200 MW

Product ID: 5302915/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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SUPRApak PH 7200 SW

Product ID: 5302915/S
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
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SUPRApak PH 5700 MW

Product ID: 5303055/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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SUPRApak PH 5700 SW

Product ID: 5303055/S
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
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SUPRApak PW 7700 MW

Product ID: 5303104/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
11.2 in
Diameter (Metric)
285 mm
Filter Media
Cellulose
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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PERMAdur® S Support Filter Sheets, PERMAdur S 400x800 ME UF/K

Product ID: 5303293
Unit of Measure
25/EA
Min Order Qty
25
Filter Media
Celluloses, Polyolefin fibers
Filter Area (Imperial)
3.42 ft²
Filter Area (Metric)
0.32 m²
Hot Water Sanitization
85 °C
Size (Imperial)
15.7 x 31.4 in
Size (Metric)
400 x 800 mm
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Seitz® ZD Series Depth Filter Sheets, EK ZD 1003x1014

Product ID: 5303904
Unit of Measure
75/EA
Min Order Qty
75
Filter Media
Cellulose Fibers
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Metric)
1003x1014
Food Contact Compliant
Yes
409 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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