Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Accessories and Spare Parts

O-RING BS3601-242 FLUOROCARBON FDA USP3A

Product ID: GK1242PH01
Unit of Measure
1/EA
Min Order Qty
1

O-RING SIL 8602 ISO 3601-242

Product ID: ORH4PW-242
Unit of Measure
1/EA
Min Order Qty
1

ORSI ORH4W-226

Product ID: ORH4W-226
Unit of Measure
1/EA
Min Order Qty
1

CENTER POST 2 MODULE

Product ID: PDC20026
Unit of Measure
1/EA
Min Order Qty
1

CENTERPOST 1 MODULE

Product ID: PDC20025
Unit of Measure
1/EA
Min Order Qty
1

WSFZ Top Centerpost Gasket

Product ID: PDC80102P
Unit of Measure
1/EA
Min Order Qty
1

Pk of 100 sterile filter funnels (300ml)

Product ID: PENVI3100
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Palltronic® Compact Touch External Power Supply, CT001-EXTPWR

Product ID: CT001-EXTPWR
Unit of Measure
1/EA
Min Order Qty
1
Adapter Info
Includes EU, UK, US, AU adaptors

Palltronic® Compact Touch Carry Case

Product ID: CT001-CCT
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Compact Touch Thermal Printer Paper, CT001-PRTPAPER

Product ID: CT001-PRTPAPER
Unit of Measure
1/EA
Min Order Qty
1
Paper
Thermal
Paper Roll Diameter
45 mm
Paper Roll Length
25 m
Paper Roll Width
58 mm

Vent TC sight 2 ball valve 10

Product ID: D601719010
Unit of Measure
1/EA
Min Order Qty
1

E962-80 PSP GSK

Product ID: T10512117
Unit of Measure
1/EA
Min Order Qty
1
36 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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