Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Food & Beverage

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Accessories and Spare Parts

MDS Junior Style Industrial Housings for 4463 and 2230 Style Cartridges, 6 mm (1⁄4 in.) NPT

Product ID: MDS4463GN4MFH4
Unit of Measure
1/EA
Min Order Qty
1

O-RING SIL 8602 ISO 3601-242

Product ID: ORH4PW-242
Unit of Measure
1/EA
Min Order Qty
1

ORSI ORH4W-226

Product ID: ORH4W-226
Unit of Measure
1/EA
Min Order Qty
1

Pall Advanta™ Electrical Trace Heater
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KIT ACS0325EH

Product ID: ACS0325EH
Unit of Measure
1/EA
Min Order Qty
1

KIT ACS0637EX

Product ID: ACS0637EX
Unit of Measure
1/EA
Min Order Qty
1

KIT VENT TEE, 1" CLAMP, SILICONE

Product ID: ACS0956AU
Unit of Measure
1/EA
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1

KIT VENT VALVE, 1" CLAMP, EPR

Product ID: ACS0963AM
Unit of Measure
1/EA
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1

KIT VENT GAUGE, 1" CLAMP, SILICONE

Product ID: ACS0959AU
Unit of Measure
1/EA
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1

Housing Closure Kit (T-Bolt Clamp & O-Ring) Gen 2&3

Product ID: ACS1033AM
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak™ L-Series Hook Spanner DN25-100 Tool

Product ID: ACS1037AA
Unit of Measure
1/EA
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1

INLET/OUTLET ADAPTOR KIT SUPRAPAK L

Product ID: ACS1034GM
Unit of Measure
1/EA
Min Order Qty
1
45 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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