Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Accessories and Spare Parts

E962-80 PSP GSK

Product ID: T10512117
Unit of Measure
1/EA
Min Order Qty
1

ORJ7-342 ORG NORDEL E962-90

Product ID: T10520042
Unit of Measure
1/EA
Min Order Qty
1

ORG NORDEL EPDM PEROXIDE CURED

Product ID: T10540555
Unit of Measure
1/EA
Min Order Qty
1

ORH-242 O-RING VITON-A

Product ID: T10540807
Unit of Measure
1/EA
Min Order Qty
1

WASHER FLAT .50 STEEL CP

Product ID: T10644039
Unit of Measure
1/EA
Min Order Qty
1

TIE ROD NUT 303 S/S

Product ID: T10911030
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

KIT KCA69045

Product ID: KCA69045
Unit of Measure
1/EA
Min Order Qty
1

KIT KORJ7P-342

Product ID: KORJ7P-342
Unit of Measure
1/EA
Min Order Qty
1

MDS Junior Style Industrial Housings for 4463 and 2230 Style Cartridges, 6 mm (1⁄4 in.) NPT

Product ID: MDS4463GN4MFH4
Unit of Measure
1/EA
Min Order Qty
1

O-RING BS3601-242 FLUOROCARBON FDA USP3A

Product ID: GK1242PH01
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Compact Touch External Power Supply, CT001-EXTPWR

Product ID: CT001-EXTPWR
Unit of Measure
1/EA
Min Order Qty
1
Adapter Info
Includes EU, UK, US, AU adaptors

Palltronic® Blue Pneumatic Tubing (3m) with Stäubli fittings and vent valve (connects Compact Touch to test housing)

Product ID: CT001-OUTTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Coupling
Length (m)
3 m
45 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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