Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Food & Beverage

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Accessories and Spare Parts

INLET/OUTLET ADAPTOR KIT SUPRAPAK L

Product ID: ACS1034GM
Unit of Measure
1/EA
Min Order Qty
1

PLC COMP,SIEMENS,Siematic,S7/M7PROFI HMI

Product ID: WH028947
Unit of Measure
1/EA
Min Order Qty
1

Pall Advanta™ Electrical Trace Heater
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SUPRApak™ L-Series Hook Spanner DN25-100 Tool

Product ID: ACS1037AA
Unit of Measure
1/EA
Min Order Qty
1

KIT VENT VALVE, 1" CLAMP, EPR

Product ID: ACS0963AM
Unit of Measure
1/EA
Min Order Qty
1

KIT ACS0637EX

Product ID: ACS0637EX
Unit of Measure
1/EA
Min Order Qty
1

KIT VENT GAUGE, 1" CLAMP, SILICONE

Product ID: ACS0959AU
Unit of Measure
1/EA
Min Order Qty
1

Flat gasket, Silicone 53/70x5mm, blue

Product ID: B7709010014
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Blue Pneumatic Tubing (3m) with Stäubli fittings and vent valve (connects Compact Touch to test housing)

Product ID: CT001-OUTTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Coupling
Length (m)
3 m

MDS Junior Style Industrial Housings for 4463 and 2230 Style Cartridges, 6 mm (1⁄4 in.) NPT

Product ID: MDS4463GN4MFH4
Unit of Measure
1/EA
Min Order Qty
1

KIT - PDC80022P

Product ID: PDC80022P
Unit of Measure
1/EA
Min Order Qty
1

Housing Closure Kit (T-Bolt Clamp & O-Ring) Gen 2&3

Product ID: ACS1033AM
Unit of Measure
1/EA
Min Order Qty
1
45 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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