Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Filter Cartridges

FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA1PFRW1

Product ID: KA1PFRW1
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA2PFRW1

Product ID: KA2PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Double Layer PTFE
Maximum Differential Pressure
3.5 bard @ < 40° C (68◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes
FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA3PFRW1

Product ID: KA3PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Double Layer PTFE
Maximum Differential Pressure
3.5 bard @ < 40° C (68◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes

5µm, 10", DOE (no seal) F&B

Product ID: CLR510W480
Unit of Measure
36/EA
Min Order Qty
36

5µm, 20", DOE (no seal) F&B

Product ID: CLR520W480
Unit of Measure
24/EA
Min Order Qty
24

Claris® Filter Cartridge, 5 µm, 30 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR530M8WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Claris® Filter Cartridge, CLR530W480

Product ID: CLR530W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridge, 5 µm, 40 in, Single Open End with Flat Closed End, 2 locking Tabs and External 226 O-rings

Product ID: CLR540M6WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
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Claris® Filter Cartridge, 5 µm, 40 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR540M8WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes

Claris® Filter Cartridge, CLR540W480

Product ID: CLR540W480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket O-Ring Code
Blank
See All Attributes
FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR7WH4

Product ID: AB05PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR2WH4

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
See All Attributes
165 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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