Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Filter Cartridges

FILTER 10" PROFILE STAR 20µm F & B

Product ID: AB1A2007WJ
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

PAREQII Filter Cartridge, AB1PAREQII7WH4

Product ID: AB1PAREQII7WH4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area (Metric m²)
0.75 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Supor® Beverage Filter Cartridges, AB1SBB7WH4

Product ID: AB1SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polyethersulfone (PES)
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Filter 20" Prof/Star 40µm Food and Bev

Product ID: AB2A4007WJ
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Supor® Beverage Filter Cartridges, AB3SBK7WH4

Product ID: AB3SBK7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.65 µm
Membrane Material
PES
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric m²)
2.25 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
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Poly-Fine® II Filter Cartridge, PFT02520UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02520UEW480

Product ID: PFT02520UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
PFT 0.45-40US-M8W 480 product photo

PFT 0.45-40US-M8W 480

Product ID: PFT04540USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.8-10US-M3W  480 product photo

PFT0810USM3W480

Product ID: PFT0810USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
PFT 0.8-30UH-M7W 480 product photo

PFT 0.8-30UH-M7W 480

Product ID: PFT0830UHM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
PFT 30-30US-M8W 480 product photo

PFT 30-30US-M8W 480

Product ID: PFT3030USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA1PFRW1

Product ID: KA1PFRW1
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA2PFRW1

Product ID: KA2PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Double Layer PTFE
Maximum Differential Pressure
3.5 bard @ < 40° C (68◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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