Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Filter Cartridges

Profile® UP Filter Cartridges, 10 in, 40 µm, Ethylene Propylene Rubber

Product ID: PUY1UY400WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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Profile® UP Filter Cartridges, PUY2UY100WJ

Product ID: PUY2UY100WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® UP Filter Cartridges, PUY3UY045WJ

Product ID: PUY3UY045WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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R030A10U

Product ID: R030A10U
Unit of Measure
30/EA
Min Order Qty
30

Profile® II Filter Cartridges, R1F010W

Product ID: R1F010W
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Profile® II Filter Cartridges, RF-Style 30 in, 10 µm W Option

Product ID: R3F100W
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Maximum Differential Pressure
4 bard (60 psid)
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Ultipor® GF-HT, TA72HT003A

Product ID: TA72HT003A
Unit of Measure
1/EA
Min Order Qty
1
Food Contact Compliant
No
FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA3PFRW1

Product ID: KA3PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Double Layer PTFE
Maximum Differential Pressure
3.5 bard @ < 40° C (68◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes

Emflon® PFRW Junior Style Filter Cartridges, MCY1110PFRWH4

Product ID: MCY1110PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
500 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
1.3 in
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Fluorodyne® II Junior Filter Cartridges, MCY4440FSDWH4

Product ID: MCY4440FSDWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
0.152 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
4.17 in
Cartridge Length (Metric)
106 mm
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Nexis® T Series Filter Cartridges 30 in, 100 µm, Single Open End with Fin End, 2 Locking Tabs and External 226 O-ring

Product ID: NXT10030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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NXT 10-10U-M7WS 480

Product ID: NXT1010UM7WS480
Unit of Measure
30/EA
Min Order Qty
30
164 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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