Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Housings, Vessels, and Assemblies

V-BAND KIT FOR SUPRApak L HOUSINGS

Product ID: 20005766-K
Unit of Measure
1/EA
Min Order Qty
1

Backflush Support Set-for SUPRAdisc II 16" modules, to be used in WSFZ 16" 4 high housings

Product ID: 20041342
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Food Contact Compliant
Yes
Hot Water Sanitization
85 °C
Steam Sterilization
121 °C
Support Grid
Polypropylene
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SUPRApak Housing Torque Unit Vented

Product ID: ACS1040AA
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak Housing Torque Unit Guide Bush

Product ID: ACS1043AA
Unit of Measure
1/EA
Min Order Qty
1

Suprapak Housing Torque Unit Clamp Nut

Product ID: ACS1044AA
Unit of Measure
1/EA
Min Order Qty
1

FBT Sanitary housing for eight cartridge filters - 762 mm (30”)

Product ID: FBT083G47H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
810 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
1428 mm
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FBT Sanitary housing for one cartridge filter - 254 mm (10”)

Product ID: FBT011G23H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
300 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
434 mm
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FBT Sanitary housing for five cartridge filters - 762 mm (30”)

Product ID: FBT053G31H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
807 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
1392.5 mm
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FBT Sanitary housing for three cartridge filters - 762 mm (30”)

Product ID: FBT033G23LH43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
807 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
1330.5 mm
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FBT Sanitary housing for one cartridge filter - 762 mm (30”)

Product ID: FBT013G23H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
800 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
954 mm
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RISER PIPING WSFZ TC 2.0

Product ID: GFB0156
Unit of Measure
1/EA
Min Order Qty
1

IDL filter housing for one cartridge type 1000 series

Product ID: IDL11GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
321 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
1000 series
Design Pressure (barg)
-1/17,9@-10/40°C -1/13,8@-10/150°C Barg / T°C
Housing Height (Metric)
362 mm
Nominal Diameter (Metric)
122 mm
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31 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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