Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Housings, Vessels, and Assemblies

V-BAND KIT FOR SUPRApak L HOUSINGS

Product ID: 20005766-K
Unit of Measure
1/EA
Min Order Qty
1

Backflush Support Set-for SUPRAdisc II 16" modules, to be used in WSFZ 16" 4 high housings

Product ID: 20041342
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Food Contact Compliant
Yes
Hot Water Sanitization
85 °C
Steam Sterilization
121 °C
Support Grid
Polypropylene
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RETROFIT ADAPTOR SPM 3-HIGH TYPE 2

Product ID: SPMRTF23
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak L Series-SA Filter Systems, 6-High Split Bowl, w/Vent, DN6 Hose Tail

Product ID: SPLSA632TVA
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
1976 mm
Cartridge Style
SUPRApak L
Design Pressure (barg)
Liquids: -1 to 8 barg Gases: -1 to 3.5 barg
Diameter (Imperial)
18 in
Housing Height (Metric)
4113 mm
Nominal Diameter (Metric)
457.2 mm
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SUPRApak Adaptor for SDII 1-High

Product ID: SPMRTF21
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 4-HIGH TYPE 2

Product ID: SPMRTF24
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 2-HIGH TYPE 2

Product ID: SPMRTF22
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak S series Filter Housings without Base Plate, 1 in, Clamp Coupling (ISO 2852)

Product ID: SPSWA2300
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
260 mm
Cartridge Style
SUPRApak S
Design Pressure (barg)
-1 to 6 bar
Diameter (Imperial)
5.1 in
Housing Height (Metric)
591.6 mm
Nominal Diameter (Metric)
130 mm
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UHFSH16G89YYJ (Horizontal)

Product ID: UHFSH16G89YYJ
Unit of Measure
1/EA
Min Order Qty
1

IDL filter housing for one cartridge type 1000 series

Product ID: IDL11GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
321 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
1000 series
Design Pressure (barg)
-1/17,9@-10/40°C -1/13,8@-10/150°C Barg / T°C
Housing Height (Metric)
362 mm
Nominal Diameter (Metric)
122 mm
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IDL13GN16J7

Product ID: IDL13GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
822 mm
Cartridge Lock
V-band
Cartridge Style
1001 V-band
Design Pressure (barg)
17.9 @ 40°C
Diameter (Imperial)
4.81 in
Housing Height (Metric)
870 mm
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Stainless steel, 10", 1" NPT, EPR seal for DOE cartridge (without gasket)

Product ID: IDLD1GN16J
Unit of Measure
1/EA
Min Order Qty
1
31 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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