Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Filter Media

Cellulose Fibers

Seitz® ZD Series Depth Filter Sheets, EK ZD 1003x1014

Product ID: 5303904
Unit of Measure
75/EA
Min Order Qty
75
Filter Media
Cellulose Fibers
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Metric)
1003x1014
Food Contact Compliant
Yes

Seitz® ZD Series Depth Filter Sheets, Seitz-EK ZD 400x400

Product ID: 5307570
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® ZD Series Depth Filter Sheets, Seitz-K 100 ZD 400x400

Product ID: 5307573
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® D-400 Support Depth Filter Sheets, Seitz D-400 400x800 ME UF/K

Product ID: 692228
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Cellulose Fibers
Filter Area (Imperial)
3.42 ft²
Filter Area (Metric)
0.32 m²
Size (Imperial)
15.7 x 31.4 in
Size (Metric)
400 x 800 mm
Food Contact Compliant
Yes
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SUPRAdisc SD II EKS 200XEKSC440SPW

Product ID: 7007957
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
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5 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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