Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Food & Beverage

Availability

In Stock

Seitz® HS Series Depth Filter sheet, HS 2000 600x612

Product ID: 1432058
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
23.62 x 24.09 in
See All Attributes

Seitz® HS Series Depth Filter sheet, HS 2000 400x400

Product ID: 1432057
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.75 x 15.75 in
See All Attributes

4.5 µm, 40" Ultipleat High Flow Element

Product ID: HFU640UY045JUW
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow Element, HFU660CAS010JUW

Product ID: HFU660CAS010JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
1 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Pleated Polypropylene / PES Membrane
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes

Ultipleat® High Flow Element, HFU660UY045JUW

Product ID: HFU660UY045JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
4.5 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes

WSFZ Standard Accessory Kit

Product ID: GFB0157
Unit of Measure
1/EA
Min Order Qty
1

Profile® Star Filter Cartridge, AB1A0507WH4

Product ID: AB1A0507WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

Fluorodyne® II Filter Cartridges, 0.2µm, 20in, Single Open End Code 7, Silicone Elastomer O-ring

Product ID: AB2FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0 µm
Membrane Material
Polyvinylidene fluoride (PVDF)
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
H4
See All Attributes

Seitz® HS Series Depth Filter sheet, HS 400 600x612

Product ID: 1430458
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
23.62 x 24.09 in
See All Attributes

SUPRApak PW 5700 LW

Product ID: 5303071
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
Food Contact Compliant
Yes
Height (Imperial)
10.7 in
See All Attributes

SUPRApak SW 5700 LW

Product ID: 5302870
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
See All Attributes

SUPRApak PW 7100 LW

Product ID: 5303072
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
Food Contact Compliant
Yes
See All Attributes
99 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English