Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Availability

In Stock

C9.75P-CB5

Product ID: C975PCB5
Unit of Measure
12/EA
Min Order Qty
12

Claris® Filter Cartridge, 10 µm, 40 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR1040M8WE480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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Claris® Filter Cartridge, CLR110W480

Product ID: CLR110W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA3PFRW1

Product ID: KA3PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Double Layer PTFE
Maximum Differential Pressure
3.5 bard @ < 40° C (68◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes

EWHF16G89ZZJ

Product ID: EWHF16G89ZZJ
Unit of Measure
1/EA
Min Order Qty
1

Stand for Single round FBT housings

Product ID: FBT01STAND
Unit of Measure
1/EA
Min Order Qty
1

Seitz® HS Series Depth Filter sheet, HS 400 600x612

Product ID: 1430458
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
23.62 x 24.09 in
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Seitz® HS Series Depth Filter sheet, HS 2000 600x612

Product ID: 1432058
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
23.62 x 24.09 in
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Seitz® HS Series Depth Filter sheet, HS 2000 400x400

Product ID: 1432057
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.75 x 15.75 in
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SUPRApak SW 7000 LW

Product ID: 5302741
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
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SUPRApak PW 5900 SW

Product ID: 5302742/S
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
Food Contact Compliant
Yes
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SUPRApak PW 5900 LW

Product ID: 5302742
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
Food Contact Compliant
Yes
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100 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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