Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Availability

In Stock

Seitz® HS Series Depth Filter sheet, HS 400 600x612

Product ID: 1430458
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
23.62 x 24.09 in
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Seitz® HS Series Depth Filter sheet, HS 2000 600x612

Product ID: 1432058
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
23.62 x 24.09 in
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Seitz® HS Series Depth Filter sheet, HS 2000 400x400

Product ID: 1432057
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.75 x 15.75 in
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Ultipleat® High Flow Element, HFU640CAS010JUW

Product ID: HFU640CAS010JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1016 mm (40”)
Filter Grade
1 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Pleated Polypropylene / PES Membrane
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Ultipleat® High Flow, Large Format Filters, Polypropylene, Length 40 Inches

Product ID: HFU640UY020JUW
Unit of Measure
1/EA
Min Order Qty
1

4.5 µm, 40" Ultipleat High Flow Element

Product ID: HFU640UY045JUW
Unit of Measure
1/EA
Min Order Qty
1

20 µm, 40" Ultipleat High Flow Element

Product ID: HFU640UY200JUW
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Polypropylene, Length 40 Inches

Product ID: HFU640UY400JUW
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow Element, HFU660CAS010JUW

Product ID: HFU660CAS010JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
1 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Pleated Polypropylene / PES Membrane
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Ultipleat® High Flow Element, HFU660UY045JUW

Product ID: HFU660UY045JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
4.5 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Nexis® T Series Filter Cartridges, Polypropylene, 10 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT1030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Nexis® T Series Filter Cartridges, Polypropylene, 5 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT530UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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102 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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