Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, EPDM

Product ID: NXA3TFUDOEE47
Unit of Measure
5/EA
Min Order Qty
5
Removal Rating
3 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXA
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches

Product ID: NXA4010U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches, silicone

Product ID: NXA4020UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 19.5 inches

Product ID: NXA40195U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches

Product ID: NXA4020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches

Product ID: NXA4030U946
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXA4030UM18N
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXA4030UM3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXA4040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Micron
40 micron

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA4030UM3S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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7,696 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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