Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA2010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA2010UM7S
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA2030UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, silicone

Product ID: NXA2030UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, silicone

Product ID: NXA2020UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA2030U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
20 micron

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA2030UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings

Product ID: NXA2030UM8T
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Expanded PTFE (gaskets) FEP encapsulated silicone (O-rings)
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXA2040UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA2040U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
20 micron
7,696 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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