Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Industrial Manufacturing

Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

CTRG BW HDC HS-40 C7 40" product photo

CTRG BW HDC HS-40 C7 40

Product ID: BWAB4P1000XHS
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CTRG BW HDC H400 C7 (4-HIGH) product photo

CTRG BW HDC H400 C7 (4-HIGH)

Product ID: BWAB4P400XHS
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CTRG BW HDC H050 C7 H 3H product photo

CTRG BW HDC H050 C7 H 3H

Product ID: BWAB3P050XHS
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Bleached cotton, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C100AW40S
Unit of Measure
1/EA
Min Order Qty
10
Removal Rating
100 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

C10P-AHP

Product ID: C10PAHP
Unit of Measure
20/EA
Min Order Qty
20

C10P-PHP

Product ID: C10PPHP
Unit of Measure
20/EA
Min Order Qty
20

CELLULOSE; HIGH FLOW

Product ID: CA CP721-100CN606V
Unit of Measure
1/EA
Min Order Qty
1

CPI CP723 SERIES FILTER, 10 MICRON

Product ID: CA CP723-100PP405E
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 16" U200Z 25 MICRON product photo

ELEMENT 16" U200Z 25 MICRON

Product ID: CA41074D02
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 16" U0045Z 0.45 MICRON product photo

ELEMENT 16" U0045Z 0.45 MICRON

Product ID: CA41074D11
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 8" EPOCEL EG 25 MICRON product photo

ELEMENT 8" EPOCEL EG 25 MICRON

Product ID: CA41077D02
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 12" H1000 100 MICRON product photo

ELEMENT 12" H1000 100 MICRON

Product ID: CA41083D03
Unit of Measure
1/EA
Min Order Qty
1
1,336 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English