Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Coalescers

SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LGA7H13
Unit of Measure
12/EA
Min Order Qty
12
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
0.83 bar
Change out pressure drop (psid)
12 psid
Maximum differential pressure rating (bar)
2.75 bar
Maximum differential pressure rating (psid)
40 psid
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PhaseSep L/L Coalescer, 40in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS4H1AH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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Ultipleat Diesel Plus Element - JP Grade

Product ID: UDPEJP
Unit of Measure
1/EA
Min Order Qty
1

UDPS20 ELEMENT

Product ID: UDPS20
Unit of Measure
1/EA
Min Order Qty
1

Separator for Ultipleat Diesel Plus

Product ID: UDPS
Unit of Measure
1/EA
Min Order Qty
1

Pall Retrofit Coalescers and After Filters for SPX Flow/Pneumatic Products and Other Manufacturers
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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