Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 20 inches

Product ID: NXT7520U
Unit of Measure
10/EA
Min Order Qty
10
Micron
75 micron

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT7510UM7S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps)

Product ID: NXT752925U
Unit of Measure
10/EA
Min Order Qty
10
Micron
75 micron

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, DOE Santoprene gasket seal

Product ID: NXT75301UH21403
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
75 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
H21
End Configuration
H21 - DOE, Santoprene gasket seal
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXT7540U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT7530UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT7540UM18N
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
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Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches, DOE industrial (no end caps)

Product ID: NXT75975U
Unit of Measure
30/EA
Min Order Qty
30
Micron
75 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT0110UN959
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.1 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer

Product ID: PFT0110UVM3958
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.1 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT02510UEM3
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings, Standard packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings, Standard packaging

Product ID: PFT02510UFM3414
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
1,485 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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