Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Gasket / O-Ring Material

Silicone

Ultipor® GF Plus Filter Cartridges, Removal Rating 3 μm, Length 20 inches, Polypropylene Core

Product ID: AB2U030Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Ultipor® GF Plus Filter Cartridges, Length 20 inches, Polypropylene Cage

Product ID: AB2U100Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Ultipor® GF Plus Filter Cartridges, Removal Rating 2 μm, Length 20 inches

Product ID: AB2U2-20Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Ultipor® GF Plus Filter Cartridges, Length 20 inches, Polypropylene Core, Dual 226 size O-rings bayonet lock finned end

Product ID: AB2U640Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Ultipor® GF Plus Filter Cartridges, Removal Rating 2 μm, Length 20 inches, Dual 222 size O-rings finned end

Product ID: AB2U220Z8H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Ultipor® GF Plus Filter Cartridges, Length 20 inches, Dual 222 size O-rings finned end

Product ID: AB2U640Z8H4
Unit of Measure
1/EA
Min Order Qty
1
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Posidyne® UP Filter Cartridges, Removal Rating 0.1 μm, Length 20 inches

Product ID: AB2UNIZ7EH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Profile® UP Filter Cartridges, Removal Rating 20 μm, Length 20 inches, silicone

Product ID: AB2UY2007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Profile® UP Filter Cartridges, Removal Rating 30 μm, Length 20 inches, silicone

Product ID: AB2UY3007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
30 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Profile® UP Filter Cartridges, Removal Rating 70 μm, Length 20 inches

Product ID: AB2UY7007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Profile® II Filter Cartridges, Polypropylene, Length 20 inches

Product ID: AB2Y0037PH4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

This product is currently not available. Please contact us for more information.

Profile® II Filter Cartridges, Polypropylene, Length 20 inches, silicone

Product ID: AB2Y0038H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

This product is currently not available. Please contact us for more information.

367 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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