Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Availability

In Stock

Product Type

Filter Cartridges

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

Duo-Fine®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches

Product ID: DFPT1020ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
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This product is currently not available. Please contact us for more information.

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 8 Inches

Product ID: HC6200FRS8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
12 µm
Membrane Material
Glass Fiber

MCY4463J200H13

Product ID: MCY4463J200H13
Unit of Measure
12/EA
Min Order Qty
12

PF 2-30AE

Product ID: PF230AE
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT3010UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F005H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

1P30A

Product ID: 1P30A
Unit of Measure
20/EA
Min Order Qty
20

25RPN19.5

Product ID: 25RPN195
Unit of Measure
18/EA
Min Order Qty
18

5EC4888-539C-HY40

Product ID: 5EC4888539CHY40
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-3U2-20Z-140

Product ID: 5ESC107703U220Z140
Unit of Measure
1/EA
Min Order Qty
1
429 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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