Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Availability

In Stock

Product Type

Filter Cartridges

GP 10-20A-X4V 246

Product ID: GP1020AX4V246
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

MDY1002J006H13

Product ID: MDY1002J006H13
Unit of Measure
1/EA
Min Order Qty
1

MDY1002J025H13

Product ID: MDY1002J025H13
Unit of Measure
1/EA
Min Order Qty
1

MPDF 10-20VEE

Product ID: MPDF1020VEE
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

MPDF 3-40VUU

Product ID: MPDF340VUU
Unit of Measure
1/EA
Min Order Qty
1

RING PULL 8670 ZN

Product ID: F1319264
Unit of Measure
1/EA
Min Order Qty
1

SCREW S.H.F .25-20X.50 ZN

Product ID: F1325237
Unit of Measure
1/EA
Min Order Qty
1

SEAT BALL UR229

Product ID: F1390539
Unit of Measure
1/EA
Min Order Qty
1

O-RING BUNA OR-225 FTM

Product ID: F9800696
Unit of Measure
1/EA
Min Order Qty
1

A005621249

Product ID: A005621249
Unit of Measure
10/EA
Min Order Qty
10
435 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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