Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Industrial Manufacturing

Product Type

Large Format Filters

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 1 bag, EPDM, Plastic self-adjusting flange, FSI CBFP Series vessels

Product ID: XLDM101UEPFCB
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 1 bag, No flange

Product ID: XLDM101UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: XLDM102UEPFC
Unit of Measure
4/EA
Min Order Qty
4

Discontinued

This part is no longer available. Please contact us for more information.

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 bag, No flange, Polypropylene Hardware

Product ID: XLDM102UNF
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 bag, EPDM

Product ID: XLDM102UEPFA
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 bag, Nitrile

Product ID: XLDM102UNPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, Polypropylene, Length 60 Inches, Fluorocarbon Elastomer O-ring

Product ID: XLDM1060UHFH
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
60 in
See All Attributes

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 1 bag, EPDM

Product ID: XLDM101UEPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, Polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: XLDM1060UHFJ
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
60 in
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, Polypropylene, Length 60 Inches, Nitrile O-ring

Product ID: XLDM1060UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
60 in
See All Attributes

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 1 bag, EPDM, Plastic self-adjusting flange

Product ID: XLDM101UEPFB
Unit of Measure
4/EA
Min Order Qty
4

Discontinued

This part is no longer available. Please contact us for more information.

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Size 2 bag, Nitrile, Plastic self-adjusting flange

Product ID: XLDM152UNPFB
Unit of Measure
4/EA
Min Order Qty
4
582 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English