Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industrial Manufacturing

Product Type

Metal Filters

FILTER DISC, .245 DIA., 17 MIC product photo

FILTER DISC, .245 DIA., 17 MIC

Product ID: 2002024517
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PMF™ Stainless Steel Filter Medium
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FILTER DISC, .393 DIA, 17 MIC product photo

FILTER DISC, .393 DIA, 17 MIC

Product ID: 2002039317
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7EC4881-1186H product photo

7EC4881-1186H

Product ID: 7EC48811186H
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7EC4889-1402K

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7EC4889-1179T-ALLOY20

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AB1P20018J

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AB1P40018J

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AB1RK7H4

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C14061S100 product photo

C-14-06-1S100

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C-14-06-1S200

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C-23-19-6PH

Product ID: C23196PH
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49 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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