Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Use

Air, Gas, and Vent Filtration

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches

Product ID: CLR1030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches

Product ID: CLR140
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
1 micron
Claris, Polypropylene, 20 micron, 20 inch product photo

20µm, 20", DOE (no seal)

Product ID: CLR2020
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches

Product ID: CLR2040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches

Product ID: CLR120
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: CLR110
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
1 micron

AB1RK7J

Product ID: AB1RK7J
Unit of Measure
1/EA
Min Order Qty
1

AB1RZ8H4

Product ID: AB1RZ8H4
Unit of Measure
1/EA
Min Order Qty
1

AB2M1002H1

Product ID: AB2M1002H1
Unit of Measure
1/EA
Min Order Qty
1

AB2RJ8J

Product ID: AB2RJ8J
Unit of Measure
1/EA
Min Order Qty
1

AB3PH7H1

Product ID: AB3PH7H1
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II EK 1 200XEK1S232SP product photo

SUPRAdisc SD II EK 1 200XEK1S232SP

Product ID: 7005243
Unit of Measure
1/STK
Min Order Qty
1
26 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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