Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

CRTG MCY4463U2-20ZJ

Product ID: MCY4463U220ZJ
Unit of Measure
24/EA
Min Order Qty
24
MDY1002J012H13 product photo

MDY1002J012H13

Product ID: MDY1002J012H13
Unit of Measure
1/EA
Min Order Qty
1

MDY1002J006H13

Product ID: MDY1002J006H13
Unit of Measure
1/EA
Min Order Qty
1

MDY1002J025H13

Product ID: MDY1002J025H13
Unit of Measure
1/EA
Min Order Qty
1

MDY1003U6-40ZH13

Product ID: MDY1003U640ZH13
Unit of Measure
1/EA
Min Order Qty
1

HDC® II Filter Cartridge

Product ID: MDY2230J060J
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPY13H 132

Product ID: ME3310CPY13H132
Unit of Measure
1/EA
Min Order Qty
1

MPDF 3-40VUU

Product ID: MPDF340VUU
Unit of Measure
1/EA
Min Order Qty
1
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA130UM3S
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches

Product ID: NXA4020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA520UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Marksman™, Large Format Filters, Removal Rating 20 μm, Polypropylene, Length Size 2 bag, EPDM

Product ID: NXAM202UEPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 bag
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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1,356 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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