Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

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PWC100-30-S-DOE/ product photo

PWC100-30-S-DOE/

Product ID: DP3000HDOH104
Unit of Measure
1/EA
Min Order Qty
1
DXXJ40M04730 product photo

DXXJ40M04730

Product ID: DXXJ40M04730
Unit of Measure
1/EA
Min Order Qty
1

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Polypropylene, Length 20 inches, 316L Stainless Steel Core Assembly

Product ID: E602Y400
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inch/mm
Filter Grade
40 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Profile® Coreless Large Format Filters, Removal Rating 10 μm, Length 40 inches

Product ID: E604FPS100
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 10 μm, Nylon, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604N100
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Polypropylene, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604Y400
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

O-RING BUNA OR-111

Product ID: F1124344
Unit of Measure
1/EA
Min Order Qty
1

RING RTNG UR-218

Product ID: F1124502
Unit of Measure
1/EA
Min Order Qty
1

O-RING BUNA OR-133

Product ID: F1124514
Unit of Measure
1/EA
Min Order Qty
1

O-RING VITN ORH-133

Product ID: F1124513
Unit of Measure
1/EA
Min Order Qty
1

O-RING VITN ORH-908 FTM

Product ID: F1124508
Unit of Measure
1/EA
Min Order Qty
1

O-RING BUNA OR-262 FTM

Product ID: F1124504
Unit of Measure
1/EA
Min Order Qty
1
1,408 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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