Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Seal Material

Nitrile

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 8 inches

Product ID: 10696657-001
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC7500
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 16 Inches

Product ID: 20322141C
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
Filter Removal Rating (μm)
25 µm
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 8 inches

Product ID: 20298105C
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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Ultipor, 1200psi Duplex Hsg, 1.25in BSP Ports, 16in Length, Nitrile Seals

Product ID: HH8670C20UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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Ultipor, 150psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Nitrile Seals

Product ID: HH2124A24KNSATYS34
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
150 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 250psi Simplex Hsg, 1in SAE Ports, Nitrile Seals

Product ID: HH7400A16A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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HH7400A16+++B1 ASSEMBLY HEAD

Product ID: HH7400A16B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 250psi Non-bypass Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16W1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
See All Attributes

Ultipor, 250psi Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
See All Attributes
868 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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