Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Industries

Oil & Gas

SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LGA7H13
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
0.83 bar
Change out pressure drop (psid)
12 psid
Maximum differential pressure rating (bar)
2.75 bar
Maximum differential pressure rating (psid)
40 psid
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches

Product ID: CLR2030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches

Product ID: CLR52925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
5 micron

GASKET VITON ST

Product ID: D10512-062
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, No flange

Product ID: PFTM402UNF
Unit of Measure
4/EA
Min Order Qty
4

Profile® Star, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3A1007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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This product is currently not available. Please contact us for more information.

ORING LMO C/N TEFLON

Product ID: T10505031
Unit of Measure
1/EA
Min Order Qty
1

ORJ-342 NORDEL EPDM PEROXIDE

Product ID: T10520035
Unit of Measure
1/EA
Min Order Qty
1
ORG VIT0N-A product photo

ORG VIT0N-A

Product ID: T10540047
Unit of Measure
1/EA
Min Order Qty
1

ORG NORDEL EPDM PEROXIDE CURED

Product ID: T10540133
Unit of Measure
10/EA
Min Order Qty
10

ORG NORDEL EPDM PEROXIDE CURED

Product ID: T10540347
Unit of Measure
1/EA
Min Order Qty
1

TUBEGUIDE SPRING 316

Product ID: T10565030
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
30 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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