Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Industries

Oil & Gas

Product Type

Filter Cartridges

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches

Product ID: CLR2030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches

Product ID: CLR52925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
5 micron

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN04510UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polyester, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polyester, Length 40 Inches

Product ID: E010DW40S
Unit of Measure
12/EA
Min Order Qty
12
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches

Product ID: F020AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches

Product ID: F020RW295S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, GlassFiber, Length 20 Inches

Product ID: F050AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, GlassFiber, Length 20 Inches

Product ID: F100AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel

Product ID: G005A10S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G010AW20SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 20 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 20 Inches, 316 stainless steel

Product ID: G020AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 316 stainless steel

Product ID: G100A10S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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66 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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