Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

200P19.5U product photo

200P19.5U

Product ID: 200P195U
Unit of Measure
1/EA
Min Order Qty
1
CRTG E591F2MS product photo

CRTG E591F2MS

Product ID: E591F2MS
Unit of Measure
1/EA
Min Order Qty
1
CRTG E591F2QS product photo

CRTG E591F2QS

Product ID: E591F2QS
Unit of Measure
1/EA
Min Order Qty
1

CHEM-VENT FILT

Product ID: EA91F1MX
Unit of Measure
1/EA
Min Order Qty
1
CRTG EA92F1MS product photo

CRTG EA92F1MS

Product ID: EA92F1MS
Unit of Measure
1/EA
Min Order Qty
1

CRTG EA92F2QS

Product ID: EA92F2QS
Unit of Measure
1/EA
Min Order Qty
1

CRTG EA92F2MS

Product ID: EA92F2MS
Unit of Measure
1/EA
Min Order Qty
1

CRTG EA92F4QS

Product ID: EA92F4QS
Unit of Measure
1/EA
Min Order Qty
1

AB3P01019J-FEM

Product ID: AB3P01019JFEMTIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB3Y0053J

Product ID: AB3Y0053JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB4NP10019J

Product ID: AB4NP10019J
Unit of Measure
1/EA
Min Order Qty
1
HOUSING ALTA06M67535 product photo

HOUSING ALTA06M67535

Product ID: ALTA06M67535
Unit of Measure
1/EA
Min Order Qty
1
444 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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