Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

G005AW30S-1PK product photo

G005AW30S-1PK

Product ID: G005AW30S1PK
Unit of Measure
1/EA
Min Order Qty
1
G030AW50S-1PK product photo

G030AW50S-1PK

Product ID: G030AW50S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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G0.5AW20S-1PK product photo

G0.5AW20S-1PK

Product ID: G05AW20S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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G075A10S-1PK product photo

G075A10S-1PK

Product ID: G075A10S1PK
Unit of Measure
1/EA
Min Order Qty
1
G0.5A10S-1PK product photo

G0.5A10S-1PK

Product ID: G05A10S1PK
Unit of Measure
1/EA
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1
Packaging
Individually wrapped
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USP-143 product photo

USP-143

Product ID: P2215486
Unit of Measure
1/EA
Min Order Qty
1

PFC10-C5

Product ID: PFC10C5
Unit of Measure
1/EA
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1

PFC5-C5

Product ID: PFC5C5
Unit of Measure
1/EA
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1
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3

Product ID: PFT0210UEM3BLK513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM

Product ID: PFT0210UEBLK794
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3

Product ID: PFT0210UEM3513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets) , M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets) , M3

Product ID: PFT0210UNM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
446 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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