Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Product Type

Filter Cartridges

C001AW20U product photo

C001AW20U

Product ID: C001AW20U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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C025AW19.5A product photo

C025AW19.5A

Product ID: C025AW195A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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C030AW29.25U product photo

C030AW29.25U

Product ID: C030AW2925U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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C030AW30U product photo

C030AW30U

Product ID: C030AW30U
Unit of Measure
1/EA
Min Order Qty
10
Packaging
Bulk
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C1A10SC-1PK 397 product photo

C1A10SC-1PK 397

Product ID: C1A10SC1PK397
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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CLR 10-19.8 40

Product ID: CLR1019840
Unit of Measure
24/EA
Min Order Qty
24

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM

Product ID: CLR130M7E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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CLR 30-40-M3HE

Product ID: CLR3040M3HE
Unit of Measure
24/EA
Min Order Qty
24

AB3P01019J-FEM

Product ID: AB3P01019JFEMTIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB3Y0053J

Product ID: AB3Y0053JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB4NP10019J

Product ID: AB4NP10019J
Unit of Measure
1/EA
Min Order Qty
1

CRTG PRS020H21-X

Product ID: PRS020H21X
Unit of Measure
1/EA
Min Order Qty
1
314 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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