Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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MBS1001M100H product photo

MBS1001M100H

Product ID: MBS1001M100H
Unit of Measure
1/EA
Min Order Qty
1
CARTRG MBS1001S050H2 product photo

CARTRG MBS1001S050H2

Product ID: MBS1001S050H2
Unit of Measure
1/EA
Min Order Qty
1
MBS1002RMH product photo

MBS1002RMH

Product ID: MBS1002RMH
Unit of Measure
1/EA
Min Order Qty
1

MCC1401HNTH

Product ID: MCC1401HNTH
Unit of Measure
12/EA
Min Order Qty
12

MCC1401U2-20ZH13

Product ID: MCC1401U220ZH13
Unit of Measure
6/EA
Min Order Qty
6
MCS1001EEJ product photo

MCS1001EEJ

Product ID: MCS1001EEJ
Unit of Measure
6/EA
Min Order Qty
6

MCS1001EEH13

Product ID: MCS1001EEH13
Unit of Measure
6/EA
Min Order Qty
6

5µm, 10", DOE w/seal

Product ID: MCY1001A050J
Unit of Measure
1/EA
Min Order Qty
1

10" Ultipor GF+ 1µm, DOE with EPR gaskets

Product ID: MCY1001U010ZJ
Unit of Measure
24/EA
Min Order Qty
24

1.5µm, 20", DOE w/seal

Product ID: MCY1002A015J
Unit of Measure
1/EA
Min Order Qty
1

Junior Filter HDC II 10µm

Product ID: MCY4463J100H13
Unit of Measure
12/EA
Min Order Qty
12
881 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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