Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY400J
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY200J
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Resinbondedglassfiber, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640GF020J
Unit of Measure
4/EA
Min Order Qty
4
IDL11GN12H product photo

IDL11GN12H

Product ID: IDL11GN12H
Unit of Measure
1/EA
Min Order Qty
1

LCMEH

Product ID: LCMEH
Unit of Measure
1/EA
Min Order Qty
1

AquaSep EL L/L Coalescer, 6in length, 2.75in diameter, ≤15ppm separation level, 24μm Beta 50 solids removal rating

Product ID: LCS06ELBH
Unit of Measure
4/EA
Min Order Qty
4
Maximum Operating Temperature (F)
140 °F
Maximum Operating Temperature (C)
60 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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PhaseSep L/L Coalescer, 6in length, 2.75in diameter, ≤15ppm separation level

Product ID: LCS06H1HH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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PhaseSep L/L Coalescer, 6in length, 2.75in diameter, ≤15ppm separation level

Product ID: LCS06H2AH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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PhaseSep L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level, 14µm Beta 5000 solids removal rating

Product ID: LCS2H1AH1
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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PhaseSep L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2H1AH316
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
20 in
Coalescer Length (Metric)
50.8 cm

PhaseSep AS L/L Coalescer - PPS Depth - 20" - Fine Removal Rating

Product ID: LCS2FPS100966
Unit of Measure
12/EA
Min Order Qty
12
Coalescer Length (Imperial)
20 in
Coalescer Length (Metric)
50.8 cm

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880 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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