Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

Ultipor® Filter Housing Seal Kit

Product ID: H9020SKZ
Unit of Measure
1/EA
Min Order Qty
1

MPCL 1-30E-FIN

Product ID: MPCL130EFIN
Unit of Measure
12/EA
Min Order Qty
12

MPNT 20-30E

Product ID: MPNT2030E
Unit of Measure
12/EA
Min Order Qty
12

MSP9600SU13H13

Product ID: MSP9600SU13H13
Unit of Measure
1/EA
Min Order Qty
1

MW 5-30 827

Product ID: MW530827
Unit of Measure
24/EA
Min Order Qty
24

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXA330UM8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 40 inches

Product ID: NXT0540U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches

Product ID: NXT0530UPE305
Unit of Measure
320/EA
Min Order Qty
320
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Type
NXT
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches

Product ID: NXT10020U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXT10195UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT1020UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 5 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT105UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
EPDM
See All Attributes
370 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English