Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Oil & Gas

RT250A10S product photo

RT250A10S

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MPCL 1-30E-FIN

Product ID: MPCL130EFIN
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MPNT 20-30E

Product ID: MPNT2030E
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MSP9600SU13H13

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MW 0.75-10S-1PK 246 product photo

MW 0.75-10S-1PK 246

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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches

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DFT Classic®, Filter Cartridges, Removal Rating 2 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 2 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: N002AW30A1PK
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MW 5-30 827

Product ID: MW530827
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 29.75 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 29.75 Inches

Product ID: N010AW2975ANM3F390
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: N010AW30A1PK
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N010AW30SCE-1PK product photo

N010AW30SCE-1PK

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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 40 Inches

Product ID: N010AW40SC
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881 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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