Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

MPCL 1-30E-FIN

Product ID: MPCL130EFIN
Unit of Measure
12/EA
Min Order Qty
12

MSP9600SU13H13

Product ID: MSP9600SU13H13
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer

Product ID: PFT02520USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Fluorocarbon elastomer, Plastic self-adjusting flange, Pall Marksman Series vessels, Rosedale4, Strainrite, Krystil Klear

Product ID: PFTM102UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 1 bag, No flange

Product ID: PFTM401UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, Nitrile

Product ID: PFTM402UNPFA
Unit of Measure
4/EA
Min Order Qty
4

ELEMENT 12” U2-20Z 2 MICRON

Product ID: CA24762D07
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

ELEMENT 12” U010Z 1 MICRON

Product ID: CA24762D06
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CC1LGA7H13

Product ID: CC1LGA7H13
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
10 in
Coalescer Length (Metric)
25.4 cm
Coalescer Diameter (Imperial)
2.75 in

CC2LGA7H13

Product ID: CC2LGA7H13
Unit of Measure
12/EA
Min Order Qty
12
Coalescer Length (Imperial)
20 in
Coalescer Length (Metric)
50.8 cm
Coalescer Diameter (Imperial)
2.75 in

CC3LGA7J

Product ID: CC3LGA7J
Unit of Measure
12/EA
Min Order Qty
12
Coalescer Length (Imperial)
30 in
Coalescer Length (Metric)
76.2 cm
Coalescer Diameter (Imperial)
2.75 in
SepraSol - CC3LGB7H13 product photo

SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LGB7H13
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
370 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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