Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Fluorocarbon elastomer, Plastic self-adjusting flange, Pall Marksman Series vessels, Rosedale4, Strainrite, Krystil Klear

Product ID: PFTM102UVPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, Nitrile

Product ID: PFTM402UNPFA
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 1 bag, No flange

Product ID: PFTM401UNF
Unit of Measure
1/EA
Min Order Qty
1

PS604HFGH13 ELEMENT

Product ID: PS604HFGH13
Unit of Measure
1/EA
Min Order Qty
8

L/G Coalescer Retrofit, 24.76in length, 3.75in diameter

Product ID: RDLLG424GFV
Unit of Measure
6/EA
Min Order Qty
6
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
2 bar
Maximum differential pressure rating (psid)
30 psid
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PSC06-10-S-DOE/8082160000 product photo

PSC06-10-S-DOE/8082160000

Product ID: DC1000HDOH06C
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT04520USM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard
E001AW30S product photo

E001AW30S

Product ID: E001AW30S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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E010AW30S-EC1S product photo

E010AW30S-EC1S

Product ID: E010AW30SEC1S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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E025AW30S-EC1S product photo

E025AW30S-EC1S

Product ID: E025AW30SEC1S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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E050AW30S-EC1S product photo

E050AW30S-EC1S

Product ID: E050AW30SEC1S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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832 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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