Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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10RPN20

Product ID: 10RPN20
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
3L1025W40A product photo

3L1025W40A

Product ID: 3L1025W40A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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7007251 product photo

SUPRAdisc SD II EK 200XEK0C440SP

Product ID: 7007251
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II 50 200X050C440SP product photo

SUPRAdisc SD II 50 200X050C440SP

Product ID: 7007253
Unit of Measure
1/EA
Min Order Qty
1

SUPRAdisc SD II 700 200X700C440SP

Product ID: 7007263
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1
SM Kö 3-5 abgepackt in Säcken a 25kg product photo

SM Kö 3-5 abgepackt in Säcken a 25kg

Product ID: 89582194
Unit of Measure
1/KG
Min Order Qty
1

HDC® II, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, silicone

Product ID: AB3J1007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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AquaSep XS L/L Coalescer, 6in length, 2.75in diameter, ≤15ppm separation level, 11μm Beta 5000 solids removal rating

Product ID: LCS06PXSH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
140 °F
Maximum Operating Temperature (C)
60 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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LSS06F1H

Product ID: LSS06F1H
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
6 in
Coalescer Length (Metric)
15.2 cm

PhaseSep L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2H1AH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
300 °F
Maximum Operating Temperature (C)
149 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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832 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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